Machine tools

Focusing on the needs of today’s nanotechnology industry for robust and cost-effective integrated motion solutions, attocube has developed the six degrees of freedom hexaCUBE positioning system. The hexaCUBE combines extremely stiff design and long travel range with nanometer repeatability in 6D - making it the ideal tool for the most challenging positioning tasks in precision machining, optics, semiconductor industry, and research. The hexaCUBE combines six (linear) closed-loop piezoelectric motors with an innovative assembly of highest precision ball joints and linear bearings – enabling true motion in 6D with stunning accuracy and repeatability. With its thoughtful sample platform design with integrated aperture, the hexaCUBE is perfectly suited for the ultraprecise alignment of optical and mechanical components.

Focusing on the needs of today’s nanotechnology industry for highly precise, reliable, and cost-effective positioning systems, attocube have established the ECS “Industrial Line”. The piezo-based nanopositioners satisfy highest expectations in terms of precision and stability. Due to their unrivaled accuracy, the compact drive units realize the most challenging positioning tasks e.g. in precision machining and are further successfully utilized for the nano-precise alignment of optical and mechanical components. The product range consists of a variety of linear, rotational, and goniometric positioning units. All products can be mounted on top of each other in order to achieve multi-degree of freedom motion devices offering up to 6 movement axes. Integrated cross-roller bearings guarantee maximum load capacity – up to 20 kg depending on type and size. Angular travel errors are reduced to a minimum of only 0.1 mrad (pitch, yaw, and roll) and emphasize the universal applicability.