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CHARON2 Stacked Platform

2019-02-11 14:51 | Duration 01:02 | 36 calls
CHARON2 is a new semiconductor-oriented XY, XYT, ..., stacked system, backward compatible with existing modules and options. CHARON2 design extends CHARON use cases into the space of higher dynamics and larger payloads, with further improvement on accuracy and repeatability.

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