[agoo]

Hello All,

I need to know how to make textures on a SiC (silicon carbide) or tungsten carbide flat surface 0.1-1 micron deep. These textures are called grooves (or spiral grooves) and are used in dry gas sealing of ultra high pressure compressors under about 100-300 bar pressure.
Here are examples of DGS parts look like:

https://images.app.goo.gl/ed9LT9bxnsL5WHzg9

https://images.app.goo.gl/uRZLPHTsc7H73nnx6

Texture on the parts are about 1 micron deep in some parts and in some parts 0.1 micron deep. So we are talking about ultra-precision sub-micron machining. Anyone can suggest a machine suitable for this purpose?

Some do this with lasers but I am interested in machining.

thx

[Routerfiend]

Hi
Looking at the photos I reckon they are acid etched rather than machined. But that said if I were going to attempt to machine that then i`d go over depth and surface grind it back to the desired finished depth.

[mactec54]

Hello All,

I need to know how to make textures on a SiC (silicon carbide) or tungsten carbide flat surface 0.1-1 micron deep. These textures are called grooves (or spiral grooves) and are used in dry gas sealing of ultra high pressure compressors under about 100-300 bar pressure.
Here are examples of DGS parts look like:

https://images.app.goo.gl/ed9LT9bxnsL5WHzg9

https://images.app.goo.gl/uRZLPHTsc7H73nnx6

Texture on the parts are about 1 micron deep in some parts and in some parts 0.1 micron deep. So we are talking about ultra-precision sub-micron machining. Anyone can suggest a machine suitable for this purpose?

Some do this with lasers but I am interested in machining.

thx

Etched or EDM, this type of etching is very limited in some materials, so EDM would be then the only way looking at the texture on that part, you would EDM the part and then Grind the face to the tolerance required