Hello All,

I need to know how to make textures on a SiC (silicon carbide) or tungsten carbide flat surface 0.1-1 micron deep. These textures are called grooves (or spiral grooves) and are used in dry gas sealing of ultra high pressure compressors under about 100-300 bar pressure.
Here are examples of DGS parts look like:

https://images.app.goo.gl/ed9LT9bxnsL5WHzg9

https://images.app.goo.gl/uRZLPHTsc7H73nnx6

Texture on the parts are about 1 micron deep in some parts and in some parts 0.1 micron deep. So we are talking about ultra-precision sub-micron machining. Anyone can suggest a machine suitable for this purpose?

Some do this with lasers but I am interested in machining.

thx