VFD's can put out alot of interference, there are a few measures I would check into, There is special cable made by Beldon for VFD's, but is very expensive, first , I would make sure the three phase wiring to the motor is tightly wound together, do not include the ground wire, the motor and VFD should be tied to the same ground conductor directly back to the Machine service ground supply.
There are also three phase inductors or chokes, that can be fitted on the motor as well as feed conductors.
I would try and establish that all the sensor power supply commons and the shields are taken to a common ground plate. The machine should already have this in the electrical enclosure.
A while back I retro-fitted a CNC machine that has three 5hp VFD's and using these precautions and have not seen a problem.
Al.
CNC, Mechatronics Integration and Custom Machine Design
“Logic will get you from A to B. Imagination will take you everywhere.”
Albert E.