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ETEL S.A.
140
ETEL S.A.
140
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ETEL - VULCANO XYZ3TH Stacked Platform

VULCANO XYZ3TH Motion System– a three-piece-design allowing a compact and cost engineered solution, coupled to mechanical bearings and high-end optical encoders. This platform can easily be coupled with a rotary module RTTB or the brand new Z3TH combined module. This latter provides a Tip and Tilt correction, a double Z-axes, 364° Theta rotation and 4 degrees of freedom.

Visit www.etel.ch for more information
#ETEL #motion system #stacked system #stacked platform #XYZ3TH #Z3TH combined module #direct drive technology #VULCANO #three linear guides #wafer process control #nanometer position stability #compact footprint #high position stability #high dynamics #high bidirectional repeatability #mechanical bearing #tip-tilt correction #double z integration #z straightness #z repeatability #vacuum supply #correct stage flatness
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