XYZ dual inspection gantry for semiconductors
Customizable

• Ideal for automated inspection of wafers / semiconductors
• Very large;he travel range of 2 x each 720 x 720 x 100 mm
• Allows the integration of two processes simultaneously

This inspection system consists of four clean room axes and allows the automated measurement of multiple objects simultaneously. High dynamics and highest reproducibility are achieved. One high-resolution camera or sensor per side is moved relative to the sample to check geometries, perform measurements and document special quality features.

Specifications
- Stroke: 2 x each 720 x 720 x 100 mm
- each 2x X-axes for scanners / microscopes up to 25 kg
- each 2x Y-axes for chucks up to 23 kg / wafers up to 12" / 300 mm
- Repeatability: 1.5 – ± 0.3 µm
- Speed: 750 – 1500 mm (XY) / 150 – 300 (Z)
- Max. Load: 150 N (XY) / 200 N (Z)
- Drive: linear motor (ironless), profile rail (XY) | ball screw, AC servo (Z)
- Feedback: linear measurement system, motor encoder
- Motion controller: FMC-250/280, ACS, PLC integration
- Clean room class: ISO 2

Customized options:
- Process adaptation, sample holder, head / sensor
- Ausführungen für Cleanroom ISO 14644-1 (up to class 1 on request)
- Rack, vibration isolation, enclosure, safety concept
- Connections fü
- Extension of the degrees of freedom for XYZ-Rx-Ry-Rz movements
- Individual solution finding with 3D design for the positioning task Translated with DeepL