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attocube

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hexaCUBE – integrated 6D motion solution
hexaCUBE – integrated 6D motion solution
Ultraprecision processing
attocube systems AG
Ultraprecision processing
Focusing on the needs of today’s nanotechnology industry for robust and cost-effective integrated motion solutions, attocube has developed the six degrees of freedom hexaCUBE positioning system. The hexaCUBE combines extremely stiff design and long travel range with nanometer repeatability in 6D - making it the ideal tool for the most challenging positioning tasks in precision machining, optics, semiconductor industry, and research.

The hexaCUBE combines six (linear) closed-loop piezoelectric motors with an innovative assembly of highest precision ball joints and linear bearings – enabling true motion in 6D with stunning accuracy and repeatability. With its thoughtful sample platform design with integrated aperture, the hexaCUBE is perfectly suited for the ultraprecise alignment of optical and mechanical components.
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Piezo Drives
Piezo Drives
Ultraprecision processing
attocube systems AG
Ultraprecision processing
Piezo Drives
Focusing on the needs of today’s nanotechnology industry for highly precise, reliable, and cost-effective positioning systems, attocube have established the ECS “Industrial Line”.

The piezo-based nanopositioners satisfy highest expectations in terms of precision and stability. Due to their unrivaled accuracy, the compact drive units realize the most challenging positioning tasks e.g. in precision machining and are further successfully utilized for the
nano-precise alignment of optical and mechanical components.

The product range consists of a variety of linear, rotational, and goniometric positioning units. All products can be mounted on top of each other in order to achieve multi-degree of freedom motion devices offering up to 6 movement axes.

Integrated cross-roller bearings guarantee maximum load capacity – up to 20 kg depending on type and size. Angular travel errors are reduced to a minimum of only 0.1 mrad (pitch, yaw, and roll) and emphasize the universal applicability.
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attoFPSensor – attocube’s nanoprecise interferometer
attoFPSensor – attocube’s nanoprecise interferometer
Angle and inclination measurement
attocube systems AG
Protractors and sine bars
The high sensitivity, ultra-precise interferometric displacement sensor attoFPS enables displacement detection and vibration measurements in the sub-nanometer range.
Its sophisticated working principle allows the simultaneous detection of position variations of up to three targets at distances up to 1 m. Due to the elaborated three-axis design, angular variations and tilt effects can be measured and detected most precisely.

In contrast to conventional laser interferometry systems, the attoFPSensor is an all fiber-based interferometer, reducing the physical dimensions of the sensor head to the millimeter range. Due to its most resistant material characteristics the attoFPSensor can also be used under extreme conditions at operating temperatures between -250°C and +150° C.

Despite its exceptional sensitivity, the sensor is capable of tracking target velocities of up
to 2 m/s – with no degradation in resolution or accuracy. Vibration measurements for components can be realized with up
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attoFPSensor – attocube’s nanoprecise interferometer
attoFPSensor – attocube’s nanoprecise interferometer
Displacement and distance measurement
attocube systems AG
Distance measurement, non-contact
The high sensitivity, ultra-precise interferometric displacement sensor attoFPS enables displacement detection and vibration measurements in the sub-nanometer range. Its sophisticated working principle allows the simultaneous detection of position variations of up to three targets at distances up to 1 m. Due to the elaborated three-axis design, angular variations and tilt effects can be measured and detected most precisely.

In contrast to conventional laser interferometry systems, the attoFPSensor is an all fiber-based interferometer, reducing the physical dimensions of the sensor head to the millimeter range. Due to its most resistant material characteristics the attoFPSensor can also be used under extreme conditions at operating temperatures between -250°C and +150° C.

Despite its exceptional sensitivity, the sensor is capable of tracking target velocities of up
to 2 m/s – with no degradation in resolution or accuracy. Vibration measurements for components can be realized with up
Product details Homepage Product request