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ETEL S.A.

Products
CHARON2 STACKED SYSTEM
CHARON2 STACKED SYSTEM
Motion Systems
ETEL S.A.
Positioning systems
CHARON2 STACKED SYSTEM
CHARON2 stacked system
CHARON2 is a new semiconductor-oriented XY stacked system, backward compatible with existing modules and options. CHARON2 design extends CHARON use cases into the space of higher dynamics and larger payloads, with further improvement on accuracy and repeatability. Exceeding 1g acceleration and 1 m/s speed at doubled payload, while delivering an absolute positioning accuracy below 1 µm, CHARON2 represents a turnkey motion solution for state of the art new semiconductor applications and lifetime extension initiatives.

CHARON2 remains another perfect example of ETEL vertical integration, based on proprietary IP for motors, electronics and controlling know-how, and synergy with HEIDENHAIN when relating to world-class positioning accuracy feedback. The result is a broad family of solutions serving any OEM wafer-positioning needs, process or process-control related, and ranging from a core XY to a complete system of up to 9 axes, independently controlled.

CHARON2 stems from anticipated, aligned, OEM requirements immediately fulfilled with another optimized product, reducing OEM integration costs and time-to-market efforts.

Characteristics
- Total stroke : up to 650 mm x 410 mm
- ISO 2 clean room compatible
  • CHARON2 XY
  • CHARON2 XYT
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TELICA DUAL GANTRY MOTION SYSTEM
TELICA DUAL GANTRY MOTION SYSTEM
Positioning system
ETEL S.A.
Positioning systems
TELICA DUAL GANTRY MOTION SYSTEM
TELICA is a multi-axes platform primarily dedicated to semiconductor back-end applications. Its dual gantry architecture provides motion along 3 degrees of freedom, X, Y and Z, for a total number of 8 controlled axes. It is designed to fulfill the most challenging requirements of advanced die bonding processes (Flip-chip, Fan-out, 3D stacked packages), µ-LED bonding, dispensing applications and more.

By design, conventional motion system architectures are EITHER optimized for high positioning accuracy OR high throughput. Thanks to a very innovative motion system architecture, TELICA meets BOTH SIMULTANEOUSLY with ±1 µm global placement accuracy (blind move) at a throughput of 10 kUPH for a typical flip chip die bonding application and up to 180 kUPH for µ-LED bonding.



TELICA dual gantry motion system
TELICA is available in two standard variants: variant 1 for Wafer Level Packages (WLP) with X410 x Y445 x Z30 mm travels and variant 2 for Panel Level Packages (PLP) with X750 x Y800 x Z30 mm travels.

TELICA introduces a new metrology approach drastically reducing the Abbé errors as well as the relative positioning mismatch between process tool and substrate. Multi-dimensional encoders ensure the high placement accuracy while water cooled ironcore motors allow extreme duty cycles.

Coupled with ETEL's state-of-the-art AccurET controllers, the TELICA platform benefits from multiple control features such as: zero settling time, non-linear control, advanced feedforward and trajectory filters, full synchronization of all axes with nanosecond jitter, a specific gantry control algorithm, multidimensional mapping, advanced triggering capabilities based on real mapped position, advanced software diagnostic and system identification tools for control optimization.

Main specifications
±350 nm local placement accuracy (moves with local alignment)
±1 µm global placement accuracy (blind moves)
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METIS PLANAR PLATFORM
METIS PLANAR PLATFORM
Motion Systems
ETEL S.A.
Positioning systems
METIS PLANAR PLATFORM
This platform, Metis, is a hybrid planar mechanical/air bearing platform dedicated to step and scan applications. It is a 6 axes platform moving in X, Y, Z and Theta directions. Dynamic flatness over the full travel as well as bidirectional repeatability are key parameters. This platform is currently used in:
- Wafer Process Control applications such as Critical Dimension and Thin film Metrology.
- Wafer scribing
- Wafer Laser Thermal Annealing

It might also be used in Back End Of Line Lithography machines (mask aligners) and in some wafer dicing application.

This platform features:
- Flatness of motion given by the air bearing
- Unlimited rotation in Theta
- Double Z integration: Coarse travel for loading/unloading and fine travel for focus adjustement
- Buit-in gravity compensator in Z (patent pending)
- Yaw correction can be done by slightly shifting the Y1 and Y2 motors
- Can be further integrated with an Active Isolation System fully controlled by ETEL
- Travels in X and Y can be made longer with some limitations on the performance

Main specifications
- Total stroke: 320 mm for XY x 12 mm for Z
- Speed: 1.2 m/s for XY, 0.1 m/s for Z and 15.7 rad/s for T
- Acceleration: 1.2 g for XY, 0.2 g for Z and 104.7 rad/s2 for T
- Position stability: ±25 nm for XY, ±15 nm for Z and ±0.2 arcsec for T
- Bidirectional repeatability: ±0.4 µm for XY, ±0.3 µm for Z and ±2 arcsec for T

Ask for the corresponding Integration Manual for more information.
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VULCANO XY STACKED PLATFORM
VULCANO XY STACKED PLATFORM
Positioning system
ETEL S.A.
Positioning systems
VULCANO XY STACKED PLATFORM
The Vulcano XY system is a three-piece-design allowing a compact and cost engineered solution, coupled to mechanical bearings and high-end optical encoders.
The baseplate of the bottom axes (Y1 & Y2) is composed of 2 ironcore linear motors, controlled in a gantry mode, when used with AccurET controllers, to allow better repeatability and optimal control efficiency. The upper axis (X) is composed of a single ironcore linear motor. The use of ironcore technology offers a high force density resulting in high acceleration and speed while keeping the operating temperature at a rather low level.

The baseplate of the upper axis (X), which also holds the motor of the bottom axes (Y1 & Y2) is made of aluminum for mass optimization and dynamics. Thermal expansion is handle by flexure elements.
There are 3 linear guides on the bottom plate. The two external linear guides laying on the bottom plate of VULCANO are recirculating ball bearings while the internal one (located in the middle of the baseplate) is composed of a recirculating roller bearing. The decoupling between the three guides is made through flexural elements. Some of these elements attached to the bearing blocks of the external guides allow a translation in the X direction. Some others attached to the central rail allow a rotation around the vertical direction.

The upper axis (X) integrates 2 linear bearings. The decoupling is made via another set of flexural elements allowing a translation in the Y direction for one of the rail.

The use of this platform is suitable for, but not limited to:
- Wafer Process Control applications such as Overlay Metrology, Critical Dimension and Thin film Metrology
- Back-end: specific flip-chip processes made on large panels/substrates

Characteristics
- Compact footprint
- Nanometer position stability
- Short move and settle times
- High dynamics
- High bidirectional repeatability
- High position stability
- ISO class 1 clean room compatibility

Ask for the corresponding Integration Manual for more information.
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VULCANO XYT STACKED PLATFORM
VULCANO XYT STACKED PLATFORM
Positioning system
ETEL S.A.
Positioning systems
VULCANO XYT STACKED PLATFORM
The Vulcano XYT platform is made up of the standard Vulcano XY outfitted with the RTTB rotary module which includes high resolution encoder coupled to an outstanding mechanical bearing.
The use of this platform is suitable for, but not limited to:
-Wafer Process Control applications such as Overlay Metrology, Critical Dimension and Thin film Metrology
- Back-end: specific flip-chip processes made on large panels/substrates

Characteristics
- Compact footprint
- Nanometer position stability
- Short move and settle times
- High dynamics
- High bidirectional repeatability
- High position stability
- ISO class 1 clean room compatibility

Ask for the corresponding Integration Manual for more information.
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VULCANO XYZ3TH STACKED PLATFORM
VULCANO XYZ3TH STACKED PLATFORM
Positioning system
ETEL S.A.
Positioning systems
The Vulcano XYZ3TH platform is made up of the standard Vulcano XY outfitted with the Z3TH combined module. This 4 degrees of freedom module, provides 364° Theta rotation, double Z-axes, a coarse one for wafer loading and unloading, and a fine one for focus adjustment, as well as a Tip and Tilt correction over ±0.1°.

Characteristics
- Compact footprint
- Nanometer position stability
- High dynamics: 2.5 g, 1.5 m/s
- Low move and settle times
- ISO1 clean room compatible
- Tip-Tilt correction over ±0.1°
- Double Z integration
- Built-in gravity compensator in Z
- Outstanding Z straightness
- Enhanced Z repeatability and jitter
- Ability to correct stage flatness
- Built-in vacuum supply at chuck level

Ask for the corresponding Integration Manual for more information.
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Z3TH COMBINED MODULE
Z3TH COMBINED MODULE
Combined Module
ETEL S.A.
Positioning systems
Z3TH COMBINED MODULE
The Z3TH Combined Module is enlarging the scope of modules that can sit on top of the existing XY platforms. The Z3TH, 4 degrees of freedom module, provides 364° Theta rotation, double Z-axes, a coarse one for wafer loading and unloading, and a fine one for focus adjustment, as well as a Tip and Tilt correction over ±0.1°. This Z3TH module is a nice alternative to piezo based Z actuators, eliminating the hysteresis and non-linearity in open loop while offering better tracking error during movement, repeatability, and move and settle performance yet over much longer travels.

The Z3TH module is primarily dedicated to front-end type of applications and provides a right solution to cope with any applications requiring:
- Alignment between a process tool and a substrate
- Mapping of flatness
- Move and settle improvement

First applications are related to back-end lithography and wafer process control.

Characteristics
- 364° Theta rotation
- Tip and tilt correction over ±0.1° for leveling and for move and settle improvement
- Vacuum feed-through to the chuck level
- Double Z integration: coarse travel for loading/unloading and fine travel for focus adjustment
- ISO class 1 clean room compatibility
- Low radial axial and radial runout of ±1 µm

Ask for the corresponding Integration Manual for more information.
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ZT COMBINED MODULE
ZT COMBINED MODULE
Combined module
ETEL S.A.
Positioning systems
ZT COMBINED MODULE
The ZT box is a module combining two degrees of freedom, in Z and Theta, within one single unit. Two actuations are possible along the Z direction, a coarse one and a fine one. This module can be used in a standalone mode or mounted on top of an XY platform. This module is especially well suited for wafer process control applications such as thin film metrology, critical dimensions, etc.

Characteristics
- Infinite rotation
- Built-in vacuum supply at wafer chuck level
- Built-in gravity compensator
- ISO1 clean room compatible thanks to vacuum suction
- Coarse Z axis with 12 mm stroke for wafer loading/unloading and fine Z with 4 mm stroke for focus adjustment
- Version without a coarse Z can be done
- Very good Z jitter as well as move and settle

Main specifications
- Bidirectional repeatability: ±0.3 µm for Z and ±2 arcsec for T
- Position accuracy: ±0.6 µm for Z and ±3 arcsec for T
- Speed up to: 0.1 m/s for Z and 15.7 rad/s for T
- Acceleration up to: 0.2 g for Z and 104.7 rad/s² for T
- Position stability: ±5 nm for Z and ±0.2 arcsec for T
- Load capacity: 1 kg

Ask for the corresponding Integration Manual for more information.
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QuiET
QuiET
Active Isolation System
ETEL S.A.
Anti-vibration mounts / vibration isulation
QuiET
A new solution for vibration isolation
The QuiET Active Isolation System is a new module cancelling both stage-born and ground-born vibrations along 6 Degrees Of Freedom (6 DOF), preventing them from perturbating the process taking place on top of your motion platform.

Most of the time, high-end applications in the semiconductor industry integrate complex equipment set-up, which, in one way or another, is connected to the granite of the motion platform. As such, any vibration at the granite level translates into inaccuracies and longer settling times at the process tool level. Thanks to ETEL’s solution, getting rid of those vibrations has never been done so efficiently!

Pushing motion performance to the next level!
The QuiET Series is pushing one step further ETEL’s Forward Integration Strategy. From now on, an advanced motion platform from ETEL does not only include the advanced motion system and its associated state-of-the-art motion controllers, but can also benefit from ETEL’s proprietary active isolation module. This makes ETEL the only motion system supplier able to cover such a wide scope of supply!
Thanks to a proprietary low-noise sensor and an homogeneous, fully digital, and deterministic motion control architecture based on 1 Gb TransnET, ETEL reduces move and settle times to unprecedented values. With an acceleration feedforward accuracy reaching higher than 99%, less than 1% of the energy generated by a motion stage movement remains at the granite level! The mass of the granite on the active isolation system can therefore be kept small, which in turn reduces the overall real estate and mass, while processing tools directly benefit from a quieter environment.

Modular, scalable and serviceable
The QuiET Series has been designed to be highly modular and scalable. Thanks to a list of preselected active and passive components, ETEL can very quickly find the optimized solution accommodating your needs! Spring elements, Lorentz actuators and proprietary sensors are embedded within a sandwich-based architecture that is then customized to fulfill any system requirements and makes serviceability easier in the field. The controllers of the QuiET module and those of the motion platform are all standard AccurET controllers and can be located in the same rack or electrical cabinet.

Commissioning tool
A user friendly graphical interface is available. It is compliant with any type of stage configuration and includes:
- Automatic tuning of the feedforward parameters
- Identification of the system
- Built-in leveling capabilities
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TMB+ TORQUE MOTORS
TMB+ TORQUE MOTORS
Torque Motors
ETEL S.A.
Drive elements
TMB+ TORQUE MOTORS
After decades of worldwide presence in the machine tool industry with leading edge Torque Motors, ETEL is presenting the new TMB+ motor. TMB+ is an evolution of the renowned TMB Torque Motor that provides a combination of increased performance and new features while maintaining the interfaces of existing motors. In fact, the torque density of TMB+ is increased by up to 20% while keeping the exact same footprint and reducing the power losses by up to 30%. Speed range is also significantly extended. TMB+ is enabling enhanced machine performance and allowing new process to be achieved into existing machines without any design change efforts. With its outstanding performance level, TMB+ will give access to direct drive technology to more applications while keeping quality and reliability at their highest level and reducing cost of ownership.

All TMB+ variants are available with an optional cooling jacket. It consists of a precisely mounted metal jacket that ensures water tightness and guarantee exact same motor performance than with the conventional “open cooling” mounting. There are two different cooling jacket types to fit any machine design: radial or axial water inlet / outlet.

Characteristics
- More than 60 standard sizes available
- Active length up to 200 mm
- Four different windings per diameter
- Open or closed cooling variants
- Nickel coating on stator and rotor
- Water cooling channels
- 600 VDC bus voltage
- Very high continuous torque density
- High peak torque
- Low torque ripple
- Compatible with IMTHP module for accurate thermal control

Main specifications
- External diameter up to 1'290 mm
- Large hollow shaft up to 1'070 mm
- Peak torque up to 42'900 Nm
- Speed up to 4'590 rpm

Refer to the corresponding specifications and catalog or ask for the torque motors handbook for more information.
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TMB TORQUE MOTORS
TMB TORQUE MOTORS
Torque Motors
ETEL S.A.
Drive elements
TMB TORQUE MOTORS
The TMB torque motor has been the most famous torque motor in the machine tool industry for more than 15 years. Today, the TMB motor is used all around the world in hundreds of different applications. The TMB patented design provides the best possible torque density as well as high peak torque and extremely low torque ripple. The heat evacuation is optimized via the TMB housing’s water cooling channels to increase continuous force while keeping machine structure cold. In addition, all ETEL torque motors are provided with temperature sensors to combine maximum performance and extremely safe operation (refer to IMTHP page for more details).

Characteristics
- 50 standard models available
- Designed for the most demanding applications
- Water cooling channels
- 600 VDC bus voltage
- High continuous torque
- Very high peak torque
- Compatible with IMTHP module for accurate thermal control
- Low torque ripple

Main specifications
- External diameter up to 1'290 mm
- Large hollow shaft up to 1'070 mm
- Peak torque up to 31'200 Nm
- Speed up to 4'500 rpm

Refer to the corresponding specifications and catalog or ask for the torque motors handbook for more information.
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TMK TORQUE MOTORS
TMK TORQUE MOTORS
Torque Motors
ETEL S.A.
Drive elements
TMK TORQUE MOTORS
The TMK torque motor range is a unique design redefining the working range of torque motors in the industry. The advanced electromagnetic design of TMK motors allows them to reach speed levels that were totally unsuspected for torque motors. The TMK maximum speed range can reach 8 times the speed of similar size conventional torque motors. In addition, the continuous and peak torque is larger than similar size torque motors. As such, TMK is a unique revolutionary design that drastically changes the definition of “high speed” in the torque motor world.

Characteristics
- 24 standard models available
- More torque and more speed compared to classical torque motors
- High motor robustness (fully encapsulated magnets)
- Very high peak torque
- TMK stator (up to Ø530 mm) compatible with the mechanical interface of the TMB series
- Water cooling channels
- 600 VDC bus voltage
- Very high peak torque
- Continuous torque increased by up to 30% vs TMB
- Up to 8 times speed increase vs TMB
- Field weakening compliant
- Compatible with IMTHP module for accurate thermal control
- Low torque ripple

Main specifications
- External diameter up to 1'050 mm
- Large hollow shaft up to 800 mm
- Peak torque up to 20'800 Nm
- Speed up to 5'450 rpm

Refer to the corresponding specifications and catalog or ask for the torque motors handbook for more information.
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TML TORQUE MOTORS
TML TORQUE MOTORS
Torque Motors
ETEL S.A.
Drive elements
TML TORQUE MOTORS
The TML torque motor is a low weight and low cost version of the famous TMB motor. This motor range is perfectly suited for applications that require the dynamic performance level of a direct drive torque motor while being less demanding in continuous torque. The TML is used in applications where water cooling is not requested. TML motors are designed with specific fixing lugs to be easily assembled into the final machine structure.

Characteristics
- 25 standard models available
- Low cost
- No water cooling option
- 600 VDC bus voltage
- Very high peak torque
- Compatible with IMTHP module for accurate thermal control
- Low torque ripple

Main specifications
- External diameters up to 581 mm
- Large hollow shaft up to 420 mm
- Peak torque up to 4'990 Nm
- Speed up to 1'000 rpm

Refer to the corresponding specifications and catalog or ask for the torque motors handbook for more information.
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TMM TORQUE MOTORS
TMM TORQUE MOTORS
Torque Motors
ETEL S.A.
Drive elements
TMM TORQUE MOTORS
The ETEL TMM torque motor is a low weight and low cost version of the famous TMB motor. This motor range is perfectly suited for applications that require the dynamic performance level of a direct drive torque motor while being less demanding in continuous torque. The TMM is used in applications where water cooling is not requested. TMM motors are designed to be glued directly in the final machine structure.

Characteristics
- 25 standard models available
- Low cost
- No water cooling option
- 600 VDC bus voltage
- Very high peak torque
- Compatible with IMTHP module for accurate thermal control
- Low torque ripple

Main specifications
- External diameters up to 530 mm
- Large hollow shaft up to 420 mm
- Peak torque up to 4'990 Nm
- Speed up to 2'600 rpm

Refer to the corresponding specifications and catalog or ask for the torque motors handbook for more information.
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ZAO SHORT STROKE ACTUATOR
ZAO SHORT STROKE ACTUATOR
Precision actuator
ETEL S.A.
Precision actuators
ZAO SHORT STROKE ACTUATOR
ZAO is an actuator featuring a frictionless bearing arrangement and a light moving mass, ensuring very low and repeatable force application as well as low force overshoot at impact on a contact surface. Built to take full advantage of ETEL’s sensorless force control algorithm, ZAO allows simultaneously a very tight force control accuracy (0.2 N ±10%) and a very high dynamics capability (up to 20 g’s).

Main specifications :
- Total stroke: 27 mm
- Acceleration: 20 g
- Nominal force application: 0.2 to 2 N
- Force stability at force level 0.2N: ± 3 mN
- Typical move and force: 8.5 mm ± 0.3 mm & 0.2 N ± 0.04N in 60 ms

Ask for the corresponding Integration Manual for more information.
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DYNX VERTICAL AXIS SOLUTION
DYNX VERTICAL AXIS SOLUTION
Linear axes
ETEL S.A.
Precision actuators
DYNX VERTICAL AXIS SOLUTION
The DynX ballscrew driven linear series is a high precision axis dedicated to vertical applications. It is available with different standard travels and is ideal for all applications where high reliability, high throughput, outstanding accuracy and easy integration are required.
These DynX axes can integrate tooling plates (standard or customized) and connecting elements (motor, encoder and optional hi-flex / long-life extension cables available in different standard lengths compatible with the various ETEL's controllers).

Characteristics
- 1 width: 155 mm
- Three standard travels up to 150 mm
- Ballscrew driven version
- Dual encoder feedback
- Counterbalanced linear motor version also available on request
- Easy-to-access interface
- Options available such as limit switches, brake and encapsulation.

Main specifications
- Bidirectional repeatability ±0.5 µm at ±3s
- Absolute positioning accuracy
- down to ±4 µm (w/o mapping)
- not to exceed ±2 µm (w/ mapping)
- Speed up to 0.3 m/s
- Acceleration up to 3 g (30 m/s2)
- Position stability ±40nm
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AQUARIUS SHORT STROKE ACTUATOR
AQUARIUS SHORT STROKE ACTUATOR
Short stroke actuator
ETEL S.A.
Precision actuators
AQUARIUS SHORT STROKE ACTUATOR
This actuator, AQUARIUS, can be used in any applications where force, throughput, long lifetime and reliability are required within a small form factor. It typically fits with the requirement of independent Z axis for testing handlers.

Main specifications
- Total stroke: 11.4 mm
- Peak force: 120 N
- Continuous force: 29.5 N
- Speed up to 1 m/s
- Acceleration up to 30 g

Ask for the corresponding Integration Manual for more information.
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TUCANA SHORT STROKE ACTUATOR
TUCANA SHORT STROKE ACTUATOR
Short stroke actuator
ETEL S.A.
Precision actuators
TUCANA SHORT STROKE ACTUATOR
This actuator, Tucana, can be used in any applications where force, throughput, long lifetime and reliability are required within a small form factor. It typically fits with the requirement of independent Z axis for testing handlers.

Main specifications
> Total stroke: 10.7 mm
> Peak force: 29 N
> Continuous force: 11.5 N
> Speed up to 1 m/s
> Acceleration up to 30 g

Ask for the corresponding Integration Manual for more information.
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RTMBI ROTARY AXES
RTMBI ROTARY AXES
Rotary axes
ETEL S.A.
Indexing table units
RTMBI ROTARY AXES
The RTMBi Series is a family of high precision indexing tables proposed with 5 different active lengths. Integrating ETEL direct drive torque motors, the RTMBi Series benefits from the best motor constant on the market (Nm/?W) allowing very high acceleration during indexation with low power dissipation. The RTMBi Series is the ideal standard solution for all applications where high repeatability and short indexing times are required. This highly reliable direct drive solution allows high duty cycles, high dynamics, outstanding accuracy, low maintenance and easy integration.

A unique encoder-bearing solution provides the RTMBi series with the best torque to volume ratio on the market. An optimized hollow shaft size is available to accommodate customer cables and tubing. Alone or coupled with ETEL?s force controlled short stroke actuators and AccurET controllers, the RTMBi is the perfect solution for applications in back-end semiconductor manufacturing, electronics, automation, or printing, such as MEMS testers, die bonders, pick and place testers, turret testing handlers, and more!

Characteristics
- Rotary tables for high dynamics indexing applications
- 5 different heights
- High torque to height ratio
- High dynamics capabilities
- Large hollow shaft for maximal flexibility
- TMB torque motors technology providing high level of torque
- Semi S22 compliant.

RTMBi vs. RTMB
- Continuous torque improved by up to 20%
- Peak torque improved by 8.5%
- Inertia reduced by up to 20%
- 600 VDC compatibility
- Same mechanical interface

Main specifications
- Bidirectional repeatability ±3 arcsec at ±3sigma
- Position accuracy
- ±20 arcsec (w/o mapping)
- ±6 arcsec (w/ mapping)
- Speed up to 1200 rpm

Ask for the corresponding Integration Manual for more information.
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ILF+ IRONLESS LINEAR MOTORS
ILF+ IRONLESS LINEAR MOTORS
Linear motors
ETEL S.A.
Linear motors
ILF+ IRONLESS LINEAR MOTORS
The ILF+ ironless linear motors are small size motors perfectly suited for very high dynamic and low moving mass applications. In addition, the total absence of force ripple ensures perfect speed stability and makes ILF+ suited for any scanning applications where speed control is a key specification. As for all ironless motors, ILF+ provides zero attraction force between the glider and the magnetic ways. To further increase the continuous force, ILF+ can be delivered with a forced air cooling option.

Characteristics
- 3 standard models available
- Designed for medium force
- Small to medium sizes
- Light moving parts
- Suitable for air bearings
- Forced air cooling option
- No attraction force
- No force ripple

Main specifications
- Continuous force up to 69 N
- Peak force up to 297 N
- Low glider masses down to 100 g
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LMA IRONCORE LINEAR MOTORS
LMA IRONCORE LINEAR MOTORS
Linear motors
ETEL S.A.
Linear motors
LMA IRONCORE LINEAR MOTORS
The LMA linear motors are mid-size linear motors optimized for application requesting high continuous force. The ETEL patented design allows a high continuous force level in a very limited volume. In addition, the force ripple level is very low due to specific electromagnetical design.

Characteristics
- 8 standard models available
- Designed for high continuous force
- Medium size
- Free air cooling
- Low force ripple
- 600 VDC compliant

Main specifications
- Continuous force up to 944 N
- Peak force up to 3'650 N
- Speed up to 15 m/s

Refer to the corresponding specifications and catalog or ask for the linear motors handbook for more information.
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LMG IRONCORE LINEAR MOTORS
LMG IRONCORE LINEAR MOTORS
Linear motors
ETEL S.A.
Linear motors
LMG IRONCORE LINEAR MOTORS
The LMG linear motors are small size motors optimized for high dynamic applications. The LMG motors provide a high peak-to-continuous force ratio. With low weight and high peak force capabilities, the LMG motors are perfectly suited for high-end linear axis with mid- to-low moving masses and requesting high accelerations. In addition, the ETEL patented designs provides a very compact form factor and lowest possible force ripple for smooth motion.

Characteristics
- 14 standard models available
- Designed for high peak force
- Compact design
- Economic
- Free air cooling
- Low force ripple
- 600 VDC compliant

Main specifications
- Continuous force up to 689 N
- Peak force up to 3'630 N
- Speed up to 15 m/s

Refer to the corresponding specifications and catalog or ask for the linear motors handbook for more information.
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LMS IRONCORE LINEAR MOTORS
LMS IRONCORE LINEAR MOTORS
Linear motors
ETEL S.A.
Linear motors
LMS IRONCORE LINEAR MOTORS
The LMS linear motors provide substantially higher continuous force than the existing LMG range while being very similar in terms of mechanical integration. LMS is close enough to LMG to allow easy machine upgrade to existing LMG customers looking for higher performance. Applications for LMS can be found in any machines where a high power density is required together with a high dynamic for mid-range moving masses. LMS will successfully fulfill demanding motion requirements from high-end automation machines to demanding semicon/electronic motion systems.

Characteristics
- 14 standard models available
- Designed for high peak force
- Compact design
- Economic
- Free air cooling
- Low force ripple
- 600 VDC compliant

Main specifications
- Continuous force up to 908 N
- Peak force up to 3'640 N
- Speed up to 15 m/s

Refer to the corresponding specifications and catalog or ask for the linear motors handbook for more information.
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IMTHP MOTOR THERMAL PROTECTION
IMTHP MOTOR THERMAL PROTECTION
Motor thermal protection
ETEL S.A.
Control equipment for temperature, heat
IMTHP MOTOR THERMAL PROTECTION
The IMTHP protects ETEL torque motors against overheating. It also allows the user to reach the motor's thermal limit while keeping an acceptable security level.
- Precise temperature monitoring to avoid overheating even in demanding motor operation (e.g. stall conditions).
- Intrinsic temperature measurement delays are compensated by software to provide true real time monitoring
- Complete motor temperature information is provided to the user through: - 1 x Analog KTY signal
- 1 x Digital warning signal
- 1 x Digital error signal

Ask for the torque motors handbook for more information.
Product details Homepage Product request
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