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ETEL S.A. Products
ETEL S.A.
Rotating tables
DXR+ ROTARY AXIS
The DXR+ is a rotary module of ETEL featuring a compact design, light mass, large hollow shaft and providing the right performance to cost ratio for mid-end applications in semiconductor and electronics.
The DXR+ brings major improvements in terms of stiffness which has a direct impact on the control bandwidth of the XY stage that is supporting it. The DXR+ module can be operated from 48 VDC up to 300 VDC bus voltage. It can be driven by an AccurET modular 48 or 300, or by an AccurET VHP for better position stability requirements.

Like for any other standard modules from ETEL (ZT, Z3TH, RTTB), the DXR+ can ne mounted on any standard XY platforms. The DXR+ is a one degree of freedom module allowing unlimited angular travel. Nevertheless, as an option, travel can be limited to angular segments that are multiple of around 60°. The cleanliness level of a DXR+ ranges from ISO 5 down to ISO 1 under specific conditions.

The DXR+ module provides a right solution to cope with any applications requiring:
- Smoothness of motion
- Mid-end type of accuracy requirements (typically around 5 µm runout)
- Position stability in the 100 nm range @ 150 mm radius

The use of this module is suitable for, but not limited to:
- wafer process control, wafer dicing
- wafer scribing
- laser annealing
- solar cell manufacturing
- etc

Characteristics
- Diameter: 155 mm
- Toothless motor technology (zero cogging) for high speed stability
- Low profile / low mass for high precision applications
- High accuracy non-contact optical encoder
- Unlimited angular travel possibilities
- Large hollow shaft: 44 mm
- Vacuum supply at chuck level
- ISO class 5 clean room compatibility; possibilty to reach ISO class 1

Main specifications
- Bidirectional repeatability ±2 arcsec at ±3sigma
- Position accuracy
- down to ±30 arcsec (w/o calibration)
- down to ±3 arcsec after calibration
- Speed up to 400 rpm
- Position stability ±0.2 arcsec
- High speed stability capabilities

Ask for the corresponding Integration Manual for more information.
DYNX ROTARY AXES
DYNX ROTARY AXES
Rotary axes
ETEL S.A.
Rotating tables
DYNX ROTARY AXES
The DynX Rotary Series is a family of precision rotary positioning axes. With a product range combining 3 different diameters, the DynX rotary series is the ideal standard solution for all applications where high reliability, outstanding accuracy, low maintenance and easy integration are required. The DynX rotary product is a perfect adder to the linear ones. No interface plate is needed to interface linear and rotary axes resulting in a compact design and accurate stacked up solutions. The rotary stages are equipped with toothless motors technology providing smooth motion ideally suited for high speed stability applications. Large hollow shafts are available to accommodate customer cables and tubing.

Characteristics
- 3 different diameters: 100 / 155 / 225 mm
- Toothless motor technology (zero cogging) for high speed stability
- Low profile / low mass for high precision applications
- High accuracy non-contact optical encoder
- Limited angular travel possibilities from 20 to 390°
- Large hollow shaft for maximal flexibility
- Angular ruler for commissioning process
- Options and accessories available such as limited strokes, air purge and extension cables.

Main features
- Bidirectional repeatability ±1.5 arcsec at ±3sigma
- Position accuracy
- down to ±30 arcsec (w/o calibration)
- down to ±3 arcsec after calibration
- Speed up to 400 rpm
- Position stability ±0.2 arcsec
- High speed stability capabilities

Ask for the corresponding Integration Manual for more information.
RTTB ROTARY AXIS
RTTB ROTARY AXIS
Rotary axes
ETEL S.A.
Rotating tables
RTTB ROTARY AXIS
The RTTB axis is the first direct driven rotary stage on the market capable of nanometer position stability at a working diameter of 450 mm. This is made possible thanks to the unprecedented high resolution encoder coupled to an outstanding mechanical bearing.

This table is especially well suited for application requiring:
- Smoothness of motion, high speed stability, low tracking error
- Super high repeatability
- Very good positioning accuracy without calibration
- Outstanding position stability
- Oustanding radial and axial runouts
- ISO1 cleanroom compatible

Main specifications
- Bidirectional repeatability ±0.3 arcsec
- Position accuracy ±3 arcsec (w/o calibration)
- Speed up to 60 rpm
- Load capacity 30 kg

Ask for the corresponding Integration Manual for more information.