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isel Germany AG
Robots for other applications
Single Axis Prealigner
1-Axis Prealigner (Embedded) only work in connection with an Isel wafer handler and are integrated into the system as an additional axis. Since this prealigner has only one axis (rotation), the first step is to determine correction values for centering the wafer and align the notch / flat. In the second step, the robot corrects the eccentric misalignment when picking up the wafer by adjusting the station coordinates. By means of vacuum between end effector and prealigner the wafer is always secured and is touched at the backside. This prealigner is a cost efficient solution for standard wafers from 45 mm Ø - 470 mm Ø.


characteristics

- Alignment times
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LINEAR TRACK - Series ILD with Linearmotors
LINEAR TRACK - Series ILD with Linearmotors
Robots for other applications
isel Germany AG
Robots for other applications
±0.01 mm
Direct drive
4.5 m/s
48 m
10 m/s²
Linear Track - ILD Series
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The iLD linear track series can be integrated seamlessly into your system's handling area owing to its flexibility. Tracks are controlled in conjunction with our IWH series robots. This combination of linear tracks with isel robots makes for a very effective system and thus provides high throughputs. Depending on the application, installation can be below or to the side of the robot. The use of brushless servo motors makes linear tracks very responsive dynamically, low maintenance and quiet in operation.


Characteristics

- Maximum speed up to 4.5 m/s
- Maximum accekeration up to 10 m/s ²
- Overall lengths up to 15m
- Configurable lateral or bottom mounting
- Excellent structural rigidity
- Robust-industry-proven reliability and precision
- Simple to cennection to the robot controller
- Driven by Linear motor
- Free from wear
- Multiple motor operation
- Low-maintenance
- Made in Germany
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Hard-und-Software Advanced
Hard-und-Software Advanced
Robots for other applications
isel Germany AG
Robots for other applications
Hard-und-Software Advanced
"ADVANCED" HARDWARE & SOFTWARE
The Advanced controller is based on a continous path control with safety PLC which incorporates state-of-the-art technology. The contouring mode makes it possible to set a constant and maximum speed on the TCP, which ensures additional safety during handling the substrate. The controller runs internally with the Powerlink realtime bus system which improves performance even further.

The high-voltage technology, with the use of an additional linear motor axis is made for very dynamic performance. The supported high voltage technology offers very dynamic behavior when using an additional linear motor axis. The controller complies with the current international standards for industrial robots. Provision has been made for connection of the ergonomic Teach Pendant with its graphic operating interface, the required functions for safe set-up mode and manual mode. The operating interface integrated into the controller can be visualised on any PC with a VNC viewer. It provides an innovative and intuitive GUI for setting up and managing all functions, a diagnosis and optimisation tool.

The special features of our Advanced hard- and software are that they are our own development, therefore further developments and the know-how are completly isel owned.

Characteristics
innovative user interface
powerful control electronics ?State of the Art?
integrated safety control according to DIN EN ISO 10218-1
resolver or EnDat-2.2 encoder
19? rack 4HE or table housing
interface: Ethernet, RS232
dimensions: W 39 x H 16 x D 41,5 mm
weight: 10 kg

option: teach pendant
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Teach pendant for Advanced-Controller
Teach pendant for Advanced-Controller
Robots for other applications
isel Germany AG
Robots for other applications
Features

Optimal support when teaching an isel wafer handler
graphical user interface on a 6.5"VGA color display
ergonomic multi-grip for fatigue -free work
Hand wheel for jogging operation
Enable switch, key switch and stop button for safe manual operation (Complies iwth EN ISO 13850)
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END EFFECTORS - IEE SERIES
END EFFECTORS - IEE SERIES
Robots for other applications
isel Germany AG
Robots for other applications
END EFFECTORS - IEE SERIES
Endeffectors are designed for the handling of wafers, for example as a transport from a cassette to the prealigner. Standard iselROBOTIK end effectors are available for wafer sizes from 2" (50 mm) up to 12" (300 mm) as a horse shoe or paddle variant.

The endeffectors are optionally available with many different contact materials such as PTFE, PEEK, VITON, KALREZ. In addition to this, we also offer many special designs for your special wafers and substrates. We are also happy to design new solutions especially for your individual requirements.

Characteristics
for wafer sizes up to 18" (450 mm)
modular concept
high rigidity
good cost/performance ratio
PTFE coated
Options
different wafer mapping sensors
several surface coatings
special designs: pocket - friction wafer - edge grip - exclusion zone grip - exclusion zone vacuum - multiple
integration of customer-provided endeffectors

Special designs:
Pocket EE
Friction Wafer - Edge Grip EE
Exclusion zone Grip EE
Exclusion zone Vacuum EE
Multiple EE
Thru Beam E
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