Metrology & quality assurance

The DXRH is the newest addition to ETEL rotary axes solutions. This is a 1 DOF mechanical bearing based rotary axis providing outstanding performance in terms of accuracy and precision. Featuring a 360?000 lines encoder and unmatched mechanical characteristics directly comparable with air bearing solution without the associated complexity, the DXRH is served at its heart by HEIDENHAIN best in class encoder and bearing technology, and ETEL direct drive technology toothless motor without any torque ripple. Fully compatible with standard ETEL interfaces, the DXRH module is available as a standalone module or integrated on ETEL system?s portfolio. It also provides a performance upgrade path for all DXR+ based applications without any redesign as the interfaces are identical. The DXRH rotary module can be integrated to the CHARON2 and the VULCANO2 stacked platforms. It brings high stiffness, high precision, high accuracy, high cleanliness level as well as low thermally induced deformation thanks to its stainless steel design. With focus on easing semiconductor applications, the module remains a match to all diverse markets and needs requiring solutions for high precision and high accuracy rotation. Suited to diverse applications and industries, the DXRH rotary module is especially suitable for Wafer Process Control applications such as Overlay Metrology, Critical Dimension and Thin film Metrology as well as photonics.

The DXR+ is a rotary module of ETEL featuring a compact design, light mass, large hollow shaft and providing the right performance to cost ratio for mid-end applications in semiconductor and electronics. The DXR+ brings major improvements in terms of stiffness which has a direct impact on the control bandwidth of the XY stage that is supporting it. The DXR+ module can be operated from 48 VDC up to 300 VDC bus voltage. It can be driven by an AccurET modular 48 or 300, or by an AccurET VHP for better position stability requirements. Like for any other standard modules from ETEL (ZT, Z3TH, RTTB), the DXR+ can ne mounted on any standard XY platforms. The DXR+ is a one degree of freedom module allowing unlimited angular travel. Nevertheless, as an option, travel can be limited to angular segments that are multiple of around 60°. The cleanliness level of a DXR+ ranges from ISO 5 down to ISO 1 under specific conditions. The DXR+ module provides a right solution to cope with any applications requiring: - Smoothness of motion - Mid-end type of accuracy requirements (typically around 5 µm runout) - Position stability in the 100 nm range @ 150 mm radius The use of this module is suitable for, but not limited to: - wafer process control, wafer dicing - wafer scribing - laser annealing - solar cell manufacturing - etc Characteristics - Diameter: 155 mm - Toothless motor technology (zero cogging) for high speed stability - Low profile / low mass for high precision applications - High accuracy non-contact optical encoder - Unlimited angular travel possibilities - Large hollow shaft: 44 mm - Vacuum supply at chuck level - ISO class 5 clean room compatibility; possibilty to reach ISO class 1 Main specifications - Bidirectional repeatability ±2 arcsec at ±3sigma - Position accuracy - down to ±30 arcsec (w/o calibration) - down to ±3 arcsec after calibration - Speed up to 400 rpm - Position stability ±0.2 arcsec - High speed stability capabilities Ask for the corresponding Integration Manual for more information.

The DynX Rotary Series is a family of precision rotary positioning axes. With a product range combining 3 different diameters, the DynX rotary series is the ideal standard solution for all applications where high reliability, outstanding accuracy, low maintenance and easy integration are required. The DynX rotary product is a perfect adder to the linear ones. No interface plate is needed to interface linear and rotary axes resulting in a compact design and accurate stacked up solutions. The rotary stages are equipped with toothless motors technology providing smooth motion ideally suited for high speed stability applications. Large hollow shafts are available to accommodate customer cables and tubing. Characteristics - 3 different diameters: 100 / 155 / 225 mm - Toothless motor technology (zero cogging) for high speed stability - Low profile / low mass for high precision applications - High accuracy non-contact optical encoder - Limited angular travel possibilities from 20 to 390° - Large hollow shaft for maximal flexibility - Angular ruler for commissioning process - Options and accessories available such as limited strokes, air purge and extension cables. Main features - Bidirectional repeatability ±1.5 arcsec at ±3sigma - Position accuracy - down to ±30 arcsec (w/o calibration) - down to ±3 arcsec after calibration - Speed up to 400 rpm - Position stability ±0.2 arcsec - High speed stability capabilities Ask for the corresponding Integration Manual for more information.

ACCURET+: ULTIMATE PERFORMANCE IN MOTION CONTROL The new ACCURET+ stands for ultimate performance, a demonstration of ETEL's finest tradition in motion control. The first two members of the portfolio are the ACCURET+100 and the ACCURET+300. These controllers are compatible with all members of the AccurET family with a wider range of current levels in the same modular design. This design renders the integration of the ACCURET+ position controllers in the machine very easy and offers a very compact solution: - Each controller can drive two axes and a single power supply can be used for multiple ACCURET+ sharing the same DC bus voltage. - A wider form-factor version is available allowing the insertion of optional boards, such as the ULTIMET LIGHT TCP/IP motion controller. - Simplified power and communication wiring as well as a compact cooling unit, make the machine installation and maintenance easy to perform. - No rack is needed, making the required volume only dependent on the number of driven axes.

This motion controller is fitted with a quad-processor from which one core is fully dedicated to the user for running the so called ?Customer Software Module? (CSM). CSM is executed in a real-time operating system (namely FreeRTOS) that allows implementation of user-designed control algorithms and/or diverse functionalities based on provided EDI (ETEL Device Interfacing). The UltimET Advanced can also host ETEL made plug-ins called ?ETEL Software Modules? (ESM) that provide enhancements to ETEL motion system platforms. Thanks to the multi-core structure, ESM operates without compromising the user?s available computation power. The user core is fitted with an embedded version of EDI so that the user can code ?from the UltimET Advanced? as he was used to code from his own computer. It has direct and full access to a TCP/ IP connection and one standard Serial Peripheral Interface (SPI) connection to communicate with external devices. In addition, the user has access to local storage through an SD-Card. All this allows local or remote data storage without impacting the motion control being executed in parallel. Naturally, all this is provided on top of the basic function expected from a motion controller, which is connecting your multi-axes motion system to the machine control PC in a fast and time deterministic manner no matter the numbers of devices present on the communication bus. The UltimET Advanced supports by default the interpolation mode, enabling the execution of interpolated trajectories on 2 groups of up to 4 interpolation axes (X, Y, Z and T directions) with a very fast cycle time (100 ?s) and each interpolation axis may represent several position controller axes.

AccurET: A modular position controllers family of high performance AccurET position controllers cover a wide range of voltage and current levels in a compact solution. This makes the integration of various servo motors in a single machine very easy. Their modular mounting design makes AccurET position controllers a very compact solution: - Each controller can drive two axes and a single power supply can be used for multiple AccurETs sharing the same DC bus voltage. - An optional board can be embedded into an AccurET, such as the UltimET motion controller or the I/O board. - No rack is needed, making the required volume only dependent on the number of driven axes. - Simplified power and communication cabling as well as modular cooling unit make the machine installation and maintenance easy to perform. Machine builders will appreciate this design: cost effective, compact, quickly integrated, and easy to replace in the field. Refer to the Motion Control catalog or ask for the corresponding technical manual for more information.

For the most demanding applications, ETEL developed a unique Very High Performance position controller range called AccurET VHP. This range of product is equipped with both specific hardware and software that maximizes the performance. AccurET VHP position controllers are compatible with all the other AccurET controllers and can be dedicated to the most demanding axes of a multi-axis motion system. In fact, it is the same decentralized architecture as used in the AccurET modular. This allows an important part of the machine control software to be located at the axis level. In addition to the benefits of ETEL controllers such as high computation power, fast and real-time communication bus and state of the art control algorithms, ETEL’s VHP range is providing outstanding signal to noise ratio. AccurET VHPs are successfully used in areas such as : Process control Wafer inspection Lithography Wafer and die level packaging Test and control equipment

UltimET Light motion controller is the master on the TransnET bus and can manage up to 63 axes. More significantly, the communication performance will be the same regardless of the number of axes. To provide the best price/performance solution to its customers, ETEL designed two versions of the motion controller: the UltimET Light smart gateway is designed for price sensitive applications requiring synchronized movements. The UltimET Light interpolation version is best suited for interpolated movements. UltimET Light provides different ways to manage multi-axis movements, depending on the needs: > Movements can be either synchronized, or interpolated with G-code based, ULM (Universal Linear Movements), PVT (Position Velocity Time), PT (Position Time) and LKT (LooK-up Table) motion profiles. > Advanced control feature requiring slave to slave communication between the different position controllers need an UltimET as a TransnET master: - 3D mapping allows for correction of a stage?s known mechanical errors - Gantry acceleration feed-forward - Etc. A WAGO gateway module can be connected to the UltimET board allowing communication through Modbus TCP, interfacing up to 16 analog Inputs and 16 analog Outputs as well as 128 digital Inputs and 128 digital Outputs. UltimETs are available in three form factors in order to adapt to OEMs configuration: > The PCI or PCI Express version are integrated into a PC, which is very well suited for high speed applications requiring real-time deterministic communication. > The TCP/IP version is embedded into an AccurET position controller. This configuration is best for stand-alone machines, in which the motion control application is far from the PC controlling the machine. Refer to the Motion Control catalog or ask for the corresponding technical manual for more information.